Rigaku and Tohoku University Establish a New Research Institute for X-Ray Metrology

TOKYO — Rigaku Corporation, a group company of Rigaku Holdings and a global solutions partner for X-ray analytical systems (Head Office: Akishima, Tokyo; President and CEO: Jun Kawakami; “Rigaku”), and Tohoku University (Sendai, Miyagi; President: Teiji Tominaga; “Tohoku University”) have established the Rigaku-Tohoku University Co-Creation Research Institute for X-ray Metrology: Beyond The Limits (the “Institute”) at Tohoku University on August 1, 2026. The Institute will advance X-ray metrology technology, develop new metrology methods, and foster the next generation of researchers through an initial three-year collaboration, with the possibility of extension based on its achievements.

As semiconductors become smaller, more multilayered, and incorporate a wider range of materials, manufacturing processes are becoming increasingly complex. X-ray metrology technology is essential for high-precision, non-destructive analysis needed for supporting stable mass production, yet conventional techniques are reaching their limits in areas such as evaluation of microstructures and accurate structural analysis in the depth direction. Addressing these challenges requires new metrology technologies, including soft X-rays (X-rays with longer wavelengths and lower energy than conventional X-rays), as well as stronger capabilities built in collaboration with synchrotron radiation facilities.

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In addition, fostering professionals who can systematically understand advanced X-ray metrology and apply it in both industry and research has become increasingly important.

To address these two challenges of technology and human resources, Tohoku University, home to the next-generation synchrotron radiation facility NanoTerasu and a leader in information science, and Rigaku, with its expertise and a proven track record in X-ray metrology, have established a new institute. Under the banner “Beyond The Limits,” the Institute will integrate technological innovation and talent development to push beyond the current limits of X-ray metrology.

The Institute will develop microstructure metrology technologies by leveraging NanoTerasu’s strengths in the soft X-ray field, integrating Tohoku University’s expertise in information science with Rigaku’s technical know-how to advance data analysis. It aims to establish a technological foundation that meets increasingly sophisticated metrology and analysis needs.

The Institute will pursue collaborative research across a broad range of fields that require X-ray metrology, including challenges that cannot be addressed with conventional technologies.

The Institute will provide systematic education in X-ray metrology technology, from its fundamentals to its applications to new materials and structures, with the aim of introducing credit-bearing courses. It aims to cultivate researchers and engineers who can contribute to both industry and academia.